MICROSENSORI, MICROSISTEMI INTEGRATI E MEMS
Stampa
Anno immatricolazione
2016/2017
Anno offerta
2017/2018
Normativa
DM270
SSD
ING-INF/01 (ELETTRONICA)
Dipartimento
DIPARTIMENTO DI INGEGNERIA INDUSTRIALE E DELL'INFORMAZIONE
Corso di studio
COMPUTER ENGINEERING
Curriculum
Embedded and Control Systems
Anno di corso
Periodo didattico
Primo Semestre (02/10/2017 - 19/01/2018)
Crediti
6
Ore
45 ore di attività frontale
Lingua insegnamento
Italian
Tipo esame
SCRITTO E ORALE CONGIUNTI
Docente
Prerequisiti
Principles of mechanics. electronic circuits. electromagnetic waves.
Obiettivi formativi
This course represents a general introduction to microelectromechanical systems.
Programma e contenuti
The principle of operation of linear accelerometers, resonators, gyroscopes, pressure sensors are described. A detailed analysis of electrostatic actuators is carried on. The basic elements of MEMS fabrication are described. MOEMS are then reviewed, in particular with regard to micromirrors for laser scanning and optical switches. Electrical and optical methods for device chracterization are illustrated. Electronic interfaces for MEMS devices are discussed. Biomedical applications such as Lab-on-chip are also covered. Specific seminars are proposed each year.
Metodi didattici
Lectures (hours/year in lecture theatre): 46
Practical class (hours/year in lecture theatre): 0
Practicals / Workshops (hours/year in lecture theatre): 0
Testi di riferimento
Copies of transparencies and supplementary material available on the course web-site
Modalità verifica apprendimento
The final exam consists in a close-book written test.
Altre informazioni
The final exam consists in a close-book written test.
Obiettivi Agenda 2030 per lo sviluppo sostenibile