MICROSENSORS, INTEGRATED MICROSYSTEMS AND MEMS
Stampa
Enrollment year
2016/2017
Academic year
2017/2018
Regulations
DM270
Academic discipline
ING-INF/01 (ELECTRONICS)
Department
DEPARTMENT OF ELECTRICAL,COMPUTER AND BIOMEDICAL ENGINEERING
Course
COMPUTER ENGINEERING
Curriculum
Embedded and Control Systems
Year of study
Period
1st semester (02/10/2017 - 19/01/2018)
ECTS
6
Lesson hours
45 lesson hours
Language
Italian
Activity type
WRITTEN AND ORAL TEST
Teacher
Prerequisites
Principles of mechanics. electronic circuits. electromagnetic waves.
Learning outcomes
This course represents a general introduction to microelectromechanical systems.
Course contents
The principle of operation of linear accelerometers, resonators, gyroscopes, pressure sensors are described. A detailed analysis of electrostatic actuators is carried on. The basic elements of MEMS fabrication are described. MOEMS are then reviewed, in particular with regard to micromirrors for laser scanning and optical switches. Electrical and optical methods for device chracterization are illustrated. Electronic interfaces for MEMS devices are discussed. Biomedical applications such as Lab-on-chip are also covered. Specific seminars are proposed each year.
Teaching methods
Lectures (hours/year in lecture theatre): 46
Practical class (hours/year in lecture theatre): 0
Practicals / Workshops (hours/year in lecture theatre): 0
Reccomended or required readings
Copies of transparencies and supplementary material available on the course web-site
Assessment methods
The final exam consists in a close-book written test.
Further information
The final exam consists in a close-book written test.
Sustainable development goals - Agenda 2030