MICROSENSORS, INTEGRATED MICROSYSTEMS AND MEMS
Stampa
Enrollment year
2019/2020
Academic year
2020/2021
Regulations
DM270
Academic discipline
ING-INF/07 (ELECTRIC AND ELECTRONIC MEASUREMENT SYSTEMS)
Department
DEPARTMENT OF ELECTRICAL,COMPUTER AND BIOMEDICAL ENGINEERING
Course
ELECTRICAL ENGINEERING
Curriculum
Energetica
Year of study
Period
1st semester (28/09/2020 - 22/01/2021)
ECTS
6
Lesson hours
46 lesson hours
Language
Italian
Activity type
WRITTEN TEST
Teacher
Prerequisites
Principles of mechanics. Electronic circuits. Electromagnetic waves.
Learning outcomes
This course represents a general introduction to microelectromechanical systems.
Course contents
The principle of operation of linear accelerometer, resonators, gyroscopes, pressure sensors are described. A detailed analysis of electrostatic actuators is carried on. The basic elements of MEMS fabrication are described. MOEMS are then reviewed, in particular with regard to micromirrors for laser scanning and optical switches. Electrical and optical methods for device chracterization are illustrated. Electronic interfaces for MEMS devices are discussed. Biomedical applications such as Lab-on-chip are also covered. Specific seminars are proposed each year.
Teaching methods
Lectures (hours/year in lecture theatre): 46
Practical class (hours/year in lecture theatre): 0
Practicals / Workshops (hours/year in lecture theatre): 0
Classroom lectures are given with computer presentations.
Reccomended or required readings
Copies of transparencies and supplementary material available on the course web-site.
Assessment methods
The final exam consists in a close-book written test. The highest grade is 30/30 cum laude. The threshold grade for passing the exam is 18/30.
Further information
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Sustainable development goals - Agenda 2030